JPS6282731U - - Google Patents
Info
- Publication number
- JPS6282731U JPS6282731U JP17376785U JP17376785U JPS6282731U JP S6282731 U JPS6282731 U JP S6282731U JP 17376785 U JP17376785 U JP 17376785U JP 17376785 U JP17376785 U JP 17376785U JP S6282731 U JPS6282731 U JP S6282731U
- Authority
- JP
- Japan
- Prior art keywords
- exposure mask
- wafer
- exposure
- gap
- holes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17376785U JPS6282731U (en]) | 1985-11-12 | 1985-11-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17376785U JPS6282731U (en]) | 1985-11-12 | 1985-11-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6282731U true JPS6282731U (en]) | 1987-05-27 |
Family
ID=31111535
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17376785U Pending JPS6282731U (en]) | 1985-11-12 | 1985-11-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6282731U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002280282A (ja) * | 2001-03-16 | 2002-09-27 | Union Optical Co Ltd | ウェハのキャリブレーション方法及び装置 |
-
1985
- 1985-11-12 JP JP17376785U patent/JPS6282731U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002280282A (ja) * | 2001-03-16 | 2002-09-27 | Union Optical Co Ltd | ウェハのキャリブレーション方法及び装置 |